Sample Handling in the Silicon Cluster Tool
This page provides additional details on sample handling in the Silicon cluster tool.
The load lock is used to move 157-mm square or circular samples into the robotic transfer chamber, at any combination of up to 10 samples or masks.
The pod facilitates inter-tool sample transfer, moving samples from the Silicon cluster tool to other tools in the Process Development and Integration Laboratory, or vice versa.
Robotic Transfer Chamber
This chamber has 10 ports around its perimeter and is maintained at a base pressure of ~10-6 torr.
For more information, contact Qi Wang.