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Sample Handling in the Silicon Cluster Tool

This page provides additional details on sample handling in the Silicon cluster tool.

Load Lock

The load lock is used to move 157-mm square or circular samples into the robotic transfer chamber, at any combination of up to 10 samples or masks.

Transfer Pod

The pod facilitates inter-tool sample transfer, moving samples from the Silicon cluster tool to other tools in the Process Development and Integration Laboratory, or vice versa.

Robotic Transfer Chamber

This chamber has 10 ports around its perimeter and is maintained at a base pressure of ~10-6 torr.

For more information, contact Qi Wang.