Scanning Probe Microscopy Tool
This page provides details on the scanning probe microscopy tool in the Stand-Alone Measurements and Characterization bays of the Process Development and Integration Laboratory. This capability is currently operational.
This tool is a large-area scanning-probe microscope integrated with a sample-transfer station to move samples in controlled environments from any other available analytical or deposition system. The technique is generally non-destructive, and the system can be almost completely automated.
Techniques available are atomic force microscopy (tapping mode, non-contact, contact mode, lateral force, phase imaging), scanning tunneling microscopy (STM), electron force microscopy (EFM)/scanning Kelvin probe microscopy (SKPM), as well as custom modules (conductive AFM [C-AFM] and scanning capacitance microscopy [SCM]).
- Analyzing the morphology and electrical properties of PV materials and devices
- Obtaining high-resolution 3-dimensional images of surfaces
- Measuring surface potential, electro-conductivity, and qualitative doping information
- Veeco Dimension 5000
- Automated imaging anywhere on the surface of up to 100 pre-programmable points
- Controllable atmosphere (Ar, N2)
- Load lock attached to the glove box to avoid air exposure of the sample surface during transport to other tools
- Closed-loop scanner x-y-z
- Can take samples up to 7.87 in. x 7.87 in. in X-Y and up to 12 mm thick; compatible with the standard 157-mm x 157-mm platen size
- Veeco Dimension Hybrid XYZ Head
- 90-µm2 XY imaging area, 8-µm Z-range minimum (10 µm is typical)
- Head has <1.8-nm root-mean-square (RMS) X-Y noise level with closed-loop feedback and <0.06-nm RMS Z noise level
- Nanoscope V Controller
- Up to eight simultaneous channels in real-time scanning
- Up to 5120 x 5120 pixel images
Contact Helio Moutinho for more details.