Transient Lifetime Mapping Tool in the Integrated Measurements and Characterization Cluster Tool
This page provides details on transient lifetime mapping in the Integrated Measurements and Characterization cluster tool. This capability is planned to be operational in 2009.
The transient lifetime mapping tool contains systems for measuring minority-carrier lifetime in a vacuum chamber for integrated processing and measurements. It features a tunable, Q-switched laser as the excitation source and uses the following techniques for lifetime measurement:
- Microwave reflection photoconductive decay (μPCD)
- Resonant-coupled photoconductive decay (RCPCD). NREL has three patents on this technique.
- Measuring lifetimes by transient decay using various injection levels and wavelengths of light for excitation.
- Excitation light from laser is tunable from ~420 to ~2400 nm, and it pulses 30 times per second; pulses are ~10 ns wide
- Measurements are in vacuum
- Two RCPCD ports—one with a small spot for mapping with ~1-mm resolution, and a second with a larger spot for increased sensitivity measurements averaged over a large area
- Microwave reflection lifetime system with small spot for mapping.
Contact Steve Johnston for more details on these capabilities.