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Sample Handling in the Integrated Measurements and Characterization Cluster Tool

This page provides details on sample handling in the Integrated Measurements and Characterization cluster tool.

Photo of a circular metal chamber with several large flanges around the perimeter.  To the left is a vertical cylindrical chamber connected to the cluster tool, as well as a blue cabinet.

The central chamber containing the vacuum robot and load-lock of the Integrated Measurements and Characterization cluster tool.

Ultra-High-Vacuum Robot

An articulated robotic arm can transfer samples between any two technique chambers, load lock, or transport pod connected to the cluster tool's central chamber, while maintaining an ultra-high vacuum of <10-8 torr.

Transport Pod

The pod facilitates inter-tool sample transfer, moving samples from the Integrated Measurements and Characterization cluster tool to other tools in the Process Development and Integration Laboratory, or vice versa.