Connecting Industry Tools in the Integrated Measurements and Characterization Cluster Tool
This page provides details on connecting an industry tool to the Integrated Measurements and Characterization cluster tool. Contact Pete Sheldon for more details on this opportunity.
The load lock has a 10-platen cassette and connects with the transport pod docking station to transport samples between the Integrated Measurements and Characterization cluster tool and any other characterization or deposition chambers in the Process Development and Integration Laboratory. An ultra-high-vacuum environment is maintained.
An industry tool can be connected to this cluster tool by attaching to the load lock port. Alternatively, samples can be loaded through the transport pod.