Sample Handling in the Copper Indium Gallium Diselenide Cluster Tool
This page provides additional details on sample handling in the Copper Indium Gallium Diselenide (CIGS) cluster tool.
An articulated robotic arm can transfer wafers between any two chambers, load lock, or transfer pod connected to the central cluster-tool chamber, while maintaining an ultra-high vacuum of <10-8 torr. Two ports are left open for adding industry tools. Because this robot does not include z-motion, an added chamber must supply pick-and-place motion.
This load lock has a 10-platen cassette and connects with the transfer pod docking station to transport samples between the CIGS cluster tool and any other characterization or deposition chambers in the Process Development and Integration Laboratory. An ultra-high-vacuum environment is maintained.
For more information, contact Miguel Contreras.