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Sample Handling in the Copper Indium Gallium Diselenide Cluster Tool

Photo of man in white lab coat  examining part of the CIGS cluster tool, which is a central circular metal  chamber surrounded by more than a half dozen other deposition and processing  chambers and related electronic equipment.

Copper Indium Gallium Diselenide cluster tool, with a researcher examining one of the radio-frequency sputtering tools.

This page provides additional details on sample handling in the Copper Indium Gallium Diselenide (CIGS) cluster tool.

Central Robot

An articulated robotic arm can transfer wafers between any two chambers, load lock, or transfer pod connected to the central cluster-tool chamber, while maintaining an ultra-high vacuum of <10-8 torr. Two ports are left open for adding industry tools. Because this robot does not include z-motion, an added chamber must supply pick-and-place motion.

Load Lock

This load lock has a 10-platen cassette and connects with the transfer pod docking station to transport samples between the CIGS cluster tool and any other characterization or deposition chambers in the Process Development and Integration Laboratory. An ultra-high-vacuum environment is maintained.

For more information, contact Miguel Contreras.