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Measurements and Characterization in the Copper Indium Gallium Diselenide Cluster Tool

This page provides additional details on measurements and characterization in the Copper Indium Gallium Diselenide (CIGS) cluster tool. This tool can also be disconnected from the CIGS tool and reconnected on a port on the Integrated Measurements and Characterization cluster tool.

Auger Electron Spectroscopy Analytical Tool

Photo of spherical metal chamber with top viewing ports and several other flanges.  Various gas hoses and electrical connections are attached to the chamber, which is held in a metal frame and is connected to the CIGS cluster tool not clearly visible in the background.

Auger electron spectroscopy unit that is attached to the Copper Indium Gallium Diselenide cluster tool.

The Auger electron spectroscopy (AES) tool will be operational in 2009. It is designed for highly automated elemental composition measurements of photovoltaic materials, including point analysis, sputter depth profiling, and 2-dimensional mapping across the entire 157-mm x 157-mm substrate. It can accept samples deposited or processed in any Process Development and Integration Laboratory-compatible tools without transfer through air. In addition, a dedicated load lock permits samples that are not air-sensitive to be loaded directly into the tool.

The AES supports the Technology Roadmaps for crystalline and amorphous silicon, copper indium gallium diselenide, cadmium telluride, organic PV, transparent conducting oxides, and reliability.


  • Analyzing elemental composition (detects elements for Z>2) and chemical-state effects
  • Conducting sputter depth-profiling
  • Mapping in two dimensions for film uniformity and/or combinatorial analysis

Special features:

  • Base pressure is <10-10 torr
  • Probe sizes are down to 100 μm
  • Lateral resolution for 2-dimensional mapping is about 500 µm
  • Sputter rates for depth profiling are up to 50 nm/min
  • Energy resolution of electron spectrometer is about 100 meV
  • Data acquisition is automated
  • Has a dedicated load lock for stand-alone operation
  • Excitation source is a 0 to 5-keV electron gun
  • Detection limit is about 0.1 atomic %
  • Automated 3-axis stage provides full access to 157-mm × 157-mm sample
  • Sample orientation is face-down

For more information, contact Glenn Teeter.