Sample Handling in the Atmospheric Processing Platform
This page provides details on sample handling in the Atmospheric Processing platform.
The vacuum (<10-6 torr) robot on the Atmospheric Processing platform allows vacuum transport of the standard platen between tools without contamination by outside air. The computer-controlled robot transfers samples to and from the transport pod, the vacuum sputtering chamber, the thermal evaporator, and the glove box tools. Four ports are available for collaborator tools.
The glove box allows air-sensitive evaporator sources to be loaded.
The pod facilitates inter-tool sample transfer, moving samples from the Atmospheric Processing platform to other tools in the Process Development and Integration Laboratory, or vice versa.
Linear-Motion Transport System
The linear-motion transport system is located below the glove boxes. A door located in the bottom of each glove box facilitates loading and unloading the transport system shuttle. Once the substrates are on the shuttle mechanism, samples can be moved to other glove boxes in an inert atmosphere.
Contact Maikel van Hest for more details on these capabilities.