Atmospheric Processing Platform Capabilities
The Atmospheric Processing platform in the Process Development and Integration Laboratory offers powerful capabilities with integrated tools for depositing, processing, and characterizing photovoltaic materials and devices. In particular, this platform focuses on different methods to deposit ("write") materials onto a variety of substrates and then further process into optoelectronic materials using rapid thermal processing. You can read more on the rationale for developing this platform and its capabilities. Contact Maikel van Hest for more details on these capabilities.
The Atmospheric Processing platform will allow deposition in any sequence and is applicable to activities in all Technology Roadmaps, which include wafer/film silicon, copper indium gallium diselenide, cadmium telluride, organic photovoltaics, sensitized solar cells, multiple-exciton-generation photovoltaics, nano-architecture photovoltaics, and concentrating photovoltaics.
Most of the techniques are located entirely in glove boxes at atmospheric pressure; several techniques, however, occur within a vacuum (i.e., thermal evaporation, sputtering). Samples can remain in ambient atmospheres with a linear-motion transport system between glove boxes.
Basic Platform Capabilities
- Central robot
- Transport pod: allows inter-tool transfer of samples
- Glove box: for loading evaporator sources
- Linear-motion transport system
- Large-area robotic inkjet printing
- Large-area ultrasonic spray deposition
- Sputtering chamber
- Thermal evaporator
- Sample preparation box
- Large-area rapid thermal processing
- X-ray fluorescence
- X-ray diffraction
The figure shows where chambers or stations—numbered in the list above—are physically located within the Atmospheric Processing platform.
Other Support Capabilities
The Atmospheric Processing platform contains many capabilities for atmospheric processing research. But additional integrated and stand-alone measurements and characterization capabilities are available elsewhere in the Process Development and Integration Laboratory. Samples from the Atmospheric Processing platform can be transported to these other tools using the mobile transport pod.