PIX number

14981

Title:

Silicon cluster tool at the Process Development and Integration Laboratory (PDIL)

Caption

The silicon cluster tool consists of a central transfer chamber with robotic intra-tool transport and ten ports. It is the first test for intra-tool transport having internal transfer zone containing a vacuum robot in the PDIL. It will facilitate the development of SiN passivation layers for multi-crystalline devices. It will allow the integration of thin-film layers with crystalline silicon structures; for example, for improving the performance and understanding of heterojunction solar cells. It also has full amorphous and nanocrystalline silicon device deposition capabilities--including the ability to deposit Transparent Conducting Oxides (TCOs) -- without exposure to air between any of the steps.

Credit:

Linenberger, Mike

Publications:



Date:

3/14/2007

Index Date:

4/6/2007

DOE_office:

Notes:

High resolution digital file, ~23MB

Subject:

solar - photovoltaics; pv

Descriptors:

analyses, Auger Electron Spectroscopy, basic sciences, design, materials, people and technician, research, system components, testing

Person/Place:

Golden, Colorado; National Renewable Energy Laboratory; NREL; Science & Technology Facility; S&TF; Nelson, Brent

Release Level

Full/Internet

DOE Information:

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